SELECTIVE NUCLEATION AND GROWTH OF DIAMOND PARTICLES BY PLASMA-ASSISTED CHEMICAL VAPOR-DEPOSITION

被引:67
作者
MA, JS
KAWARADA, H
YONEHARA, T
SUZUKI, J
WEI, J
YOKOTA, Y
HIRAKI, A
机构
关键词
D O I
10.1063/1.101708
中图分类号
O59 [应用物理学];
学科分类号
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页码:1071 / 1073
页数:3
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