DIAMOND SYNTHESIS FROM GAS-PHASE IN MICROWAVE PLASMA

被引：793

作者：

KAMO, M

SATO, Y

MATSUMOTO, S

SETAKA, N

机构：

来源：

JOURNAL OF CRYSTAL GROWTH | 1983年 / 62卷 / 03期

关键词：

D O I：

10.1016/0022-0248(83)90411-6

中图分类号：

O7 [晶体学];

学科分类号：

0702 ; 070205 ; 0703 ; 080501 ;

摘要：

引用

页码：642 / 644

页数：3

共 14 条

[1] ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON [J].

AISENBERG, S ;

CHABOT, R .

JOURNAL OF APPLIED PHYSICS, 1971, 42 (07) :2953-+

[2] GROWTH OF DIAMOND SEED CRYSTALS BY VAPOR DEPOSITION [J].

ANGUS, JC ;

WILL, HA ;

STANKO, WS .

JOURNAL OF APPLIED PHYSICS, 1968, 39 (06) :2915-&

[3]

Eversole W. G., 1962, US Patent, Patent No. [3,030,187, 3030187]

[4]

Eversole W. G., 1962, US Patent, Patent No. [3,030,188, 3030188]

[5] DIAMOND SYNTHESIS IN COOL PLASMA [J].

MANIA, R ;

STOBIERSKI, L ;

PAMPUCH, R .

CRYSTAL RESEARCH AND TECHNOLOGY, 1981, 16 (07) :785-788

[6] VAPOR-DEPOSITION OF DIAMOND PARTICLES FROM METHANE [J].

MATSUMOTO, S ;

SATO, Y ;

KAMO, M ;

SETAKA, N .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1982, 21 (04) :L183-L185

[7]

SATO Y, 1980, J SURFACE SCI SOC JP, V1, P60

[8] REACTIVE PULSE PLASMA CRYSTALLIZATION OF DIAMOND AND DIAMOND-LIKE CARBON [J].

SOKOLOWSKI, M ;

SOKOLOWSKA, A ;

GOKIELI, B ;

MICHALSKI, A ;

RUSEK, A ;

ROMANOWSKI, Z .

JOURNAL OF CRYSTAL GROWTH, 1979, 47 (03) :421-426

[9] RAMAN SPECTRUM OF DIAMOND [J].

SOLIN, SA ;

RAMDAS, AK .

PHYSICAL REVIEW B, 1970, 1 (04) :1687-&

[10]

SOLIN SA, 1973, 5TH P INT C, V2, P1251

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