EVALUATION OF BARRIER METALS FOR SINTERED PLATINUM-GAAS CONTACTS

被引：17

作者：

BERENZ, JJ ^{[1
]}

SCILLA, GJ ^{[1
]}

WRICK, VL ^{[1
]}

EASTMAN, LF ^{[1
]}

MORRISON, GH ^{[1
]}

机构：

[1] CORNELL UNIV,ITHACA,NY 14853

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1976年 / 13卷 / 06期

关键词：

D O I：

10.1116/1.569093

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1152 / 1157

页数：6

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