STUDIES ON AL2O3-TI-MO-AU METALLIZATION SYSTEM

被引：24

作者：

HARRIS, JM

LUGUJJO, E

CAMPISANO, SU

NICOLET, MA

SHIMA, R

机构：

[1] CALTECH,PASADENA,CA 91125

[2] JET PROP LAB,PASADENA,CA 91104

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1975年 / 12卷 / 01期

关键词：

D O I：

10.1116/1.568580

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：524 / 527

页数：4

共 11 条

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[2] PRINCIPLES AND APPLICATIONS OF ION-BEAM TECHNIQUES FOR ANALYSIS OF SOLIDS AND THIN-FILMS [J].

CHU, WK ;

MAYER, JW ;

NICOLET, MA ;

BUCK, TM ;

AMSEL, G ;

EISEN, F .

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[4]

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[6]

MCDONALD RR, 1970, ASTRONAUT AERONAUT, V8, P36

[7]

RHODES W, 1971, NBS348 SPEC PUB, P271

[8]

SCHNABLE GL, 1967, 6 ANN REL PHYS S LOS, P170

[9] COMPOSITE FILM INTERFACE CONTROL BY SEQUENTIAL SPUTTERING [J].

SHIMA, R .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (01) :71-71

[10] RELATIONSHIP BETWEEN SUBSTRATE SURFACE CHEMISTRY AND ADHESION OF THIN-FILMS [J].

SUNDAHL, RC .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1972, 9 (01) :181-&

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