INTERACTIONS OF LOW-ENERGY REACTIVE IONS WITH SURFACES .4. CHEMICALLY BONDED DIAMOND-LIKE FILMS FROM ION-BEAM DEPOSITION

被引：97

作者：

KASI, SR

KANG, H

RABALAIS, JW

机构：

来源：

JOURNAL OF CHEMICAL PHYSICS | 1988年 / 88卷 / 09期

关键词：

D O I：

10.1063/1.454524

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：5914 / 5924

页数：11

共 39 条

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