DIAMOND-LIKE CARBON-FILMS PRODUCED IN A BUTANE PLASMA

被引：92

作者：

BERG, S

ANDERSSON, LP

机构：

[1] Institute of Technology, University of Uppsala, Uppsala

来源：

THIN SOLID FILMS | 1979年 / 58卷 / 01期

关键词：

D O I：

10.1016/0040-6090(79)90220-7

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Diamond-like carbon films produced in an r.f. butane plasma were characterized by X-ray photoemission analysis of the deposits. It was confirmed that films produced at low deposition rates were more diamond-like than films produced at high deposition rates. An investigation of the electrical properties of the films showed that the low deposition rate films were highly insulating whereas the high deposition rate films were conducting. © 1979.

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页码：117 / 120

页数：4

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