CARBON-FILM FORMATION BY LASER EVAPORATION AND ION-BEAM SPUTTERING

被引：28

作者：

FUJIMORI, S

KASAI, T

INAMURA, T

机构：

来源：

THIN SOLID FILMS | 1982年 / 92卷 / 1-2期

关键词：

D O I：

10.1016/0040-6090(82)90189-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：71 / 80

页数：10

共 12 条

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