AN ION-SPUTTERING GUN TO CLEAN CRYSTAL-SURFACES INSITU IN AN ULTRAHIGH-VACUUM ELECTRON-MICROSCOPE

被引:12
作者
MORITA, E [1 ]
TAKAYANAGI, K [1 ]
KOBAYASHI, K [1 ]
YAGI, K [1 ]
HONJO, G [1 ]
机构
[1] TOKYO INST TECHNOL,DEPT PHYS,MEGURO KU,TOKYO 152,JAPAN
关键词
D O I
10.1143/JJAP.19.1981
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1981 / 1994
页数:14
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