EFFECT OF SILICA ON NITRIDATION OF SILICON

被引：25

作者：

CAMPOSLORIZ, D ^{[1
]}

RILEY, FL ^{[1
]}

机构：

[1] UNIV LEEDS,HOULDSWORTH SCH APPL SCI,DEPT CERAMICS,LEEDS,ENGLAND

来源：

JOURNAL OF MATERIALS SCIENCE | 1976年 / 11卷 / 01期

关键词：

D O I：

10.1007/BF00541093

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：195 / 198

页数：4

共 11 条

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[4] EFFECT OF OXIDE IMPURITIES ON NITRIDATION OF HIGH-PURITY SILICON [J].

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[5]

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[7] OXYGEN-CONTENT OF ALPHA-SI3N4 SINGLE-CRYSTALS [J].

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JOURNAL OF MATERIALS SCIENCE, 1975, 10 (02) :362-363

[8]

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[9]

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[10]

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