ELECTRON-IRRADIATION EFFECT IN AUGER ANALYSIS OF SIO2

被引：200

作者：

THOMAS, S ^{[1
]}

机构：

[1] MOTOROLA INC,SEMICOND PROD DIV,ELECTR OPTICS LAB,PHOENIX,AZ 85008

来源：

JOURNAL OF APPLIED PHYSICS | 1974年 / 45卷 / 01期

关键词：

D O I：

10.1063/1.1662951

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：161 / 166

页数：6

共 21 条

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