STRUCTURAL AND ELECTRICAL CHARACTERISTICS OF PLATINUM-SILICIDE-SILICON CONTACTS AS INFLUENCED BY SPUTTER ETCHING AND ANNEALING AMBIENT

被引：11

作者：

SEVERI, M ^{[1
]}

GABILLI, E ^{[1
]}

GUERRI, S ^{[1
]}

CELOTTI, G ^{[1
]}

机构：

[1] CNR, LAMEL LAB, I-40126 BOLOGNA, ITALY

来源：

JOURNAL OF APPLIED PHYSICS | 1977年 / 48卷 / 05期

关键词：

D O I：

10.1063/1.323908

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1998 / 2003

页数：6

共 24 条

[1] MICROSTRUCTURAL AND ELECTRICAL PROPERTIES OF THIN PTSI FILMS AND THEIR RELATIONSHIPS TO DEPOSITION PARAMETERS [J].

ANDERSON, RM ;

REITH, TM .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (10) :1337-1347

[2] REVERSE CURRENT-VOLTAGE CHARACTERISTICS OF METAL-SILICIDE SCHOTTKY DIODES [J].

ANDREWS, JM ;

LEPSELTER, MP .

SOLID-STATE ELECTRONICS, 1970, 13 (07) :1011-+

[3] FORMATION OF NISI AND CURRENT TRANSPORT ACROSS NISI-SI INTERFACE [J].

ANDREWS, JM ;

KOCH, FB .

SOLID-STATE ELECTRONICS, 1971, 14 (10) :901-&

[4] ROLE OF METAL-SEMICONDUCTOR INTERFACE IN SILICON INTEGRATED-CIRCUIT TECHNOLOGY [J].

ANDREWS, JM .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (06) :972-984

[5] EFFECT OF OXIDIZING AMBIENTS ON PLATINUM SILICIDE FORMATION .2. AUGER AND BACKSCATTERING ANALYSES [J].

BLATTNER, RJ ;

EVANS, CA ;

LAU, SS ;

MAYER, JW ;

ULLRICH, BM .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (12) :1732-1736

[6] GROWTH KINETICS OBSERVED IN FORMATION OF METAL SILICIDES ON SILICON [J].

BOWER, RW ;

MAYER, JW .

APPLIED PHYSICS LETTERS, 1972, 20 (09) :359-&

[7]

CHRIST JG, 1969, IEEE SPECTRUM, V6, P109, DOI 10.1109/MSPEC.1969.5214011

[8] SURFACE-STATE AND INTERFACE EFFECTS IN SCHOTTKY BARRIERS AT N-TYPE SILICON SURFACES [J].

CROWELL, CR ;

SHORE, HB ;

LABATE, EE .

JOURNAL OF APPLIED PHYSICS, 1965, 36 (12) :3843-&

[9] CURRENT TRANSPORT IN METAL-SEMICONDUCTOR BARRIERS [J].

CROWELL, CR ;

SZE, SM .

SOLID-STATE ELECTRONICS, 1966, 9 (11-1) :1035-&

[10] INTERDIFFUSION AND COMPOUND FORMATION IN THIN FILMS OF PD OR PT ON SI SINGLE CRYSTALS [J].

DROBEK, J ;

SUN, RC ;

TISONE, TC .

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1971, 8 (01) :243-+

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