VAPOR GROWTH PARAMETERS AND IMPURITY PROFILES ON N-TYPE GAAS FILMS GROWN ON N+-GAAS BY HYDROGEN-WATER VAPOR PROCESS

被引:29
作者
LAWLEY, KL
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D O I
10.1149/1.2423924
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:240 / &
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共 12 条
[1]  
FROSCH C, PRIVATE COMMUNICATIO
[2]   THE EPITAXIAL GROWTH OF GAP BY A GA2O VAPOR TRANSPORT MECHANISM [J].
FROSCH, CJ .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1964, 111 (02) :180-184
[3]  
FURNANAGE RA, PRIVATE COMMUNICATIO
[4]  
GOLDSTEIN B, 1962, COMPOUND SEMICONDUCT, V1
[5]  
GOTTLIEB GE, 1963, RCA REV, V24, P585
[6]  
KAHNG D, 1964, BELL SYSTEM TECH J, V43, P1
[7]  
KOHM C, 1957, PHYS REV, V108, P965
[8]   DIFFUSION OF IMPURITIES DURING EPITAXY [J].
RICE, W .
PROCEEDINGS OF THE IEEE, 1964, 52 (03) :284-&
[10]   THE CHEMICAL POLISHING OF GALLIUM ARSENIDE IN BROMINE-METHANOL [J].
SULLIVAN, MV ;
KOLB, GA .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1963, 110 (06) :585-587