Growth of PbS and CdS thin films by low-pressure chemical vapour deposition using dithiocarbamates

Thin films of cadmium and lead sulphides grown by chemical vapour deposition (CVD) and remote plasma enhanced chemical vapour deposition (RPECVD) using dithiocarbamates as precursors were prepared on fused silica, sapphire, (111)Si and (111)InP substrates. These films were deposited in the temperature range 473-873 K. It was established that the activation energy of the CVD process is 191.5 +/- 1.5 kJ mol(-1). The structure of polycrystalline films was halenide for PbS and wurtzite for CdS. It was also found that r.f.-plasma activation of the gas phase decreases remarkably the growth temperature and orders the film structure. RPECVD sulphide films had a high degree of preferred orientation.