Fundamentals of SiC-based device processing

被引：49

作者：

Melloch, MR

Cooper, JA

机构：

来源：

MRS BULLETIN | 1997年 / 22卷 / 03期

关键词：

D O I：

10.1557/S0883769400032759

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：42 / 47

页数：6

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