In situ analysis of gaseous species for chemical vapor deposition diamond synthesis and the possible reaction model

被引：10

作者：

Uede, M ^{[1
]}

Takagi, Y ^{[1
]}

机构：

[1] Teikyo Univ Sci & Technol, Uenohara, Yamanashi 4090193, Japan

来源：

JOURNAL OF MATERIALS RESEARCH | 2001年 / 16卷 / 11期

关键词：

Chemical vapor deposition - Gas chromatography - Graphite - Hydrogen - Scanning electron microscopy - Silicon wafers - Substrates - Synthesis (chemical);

D O I：

10.1557/JMR.2001.0424

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

For a few years, we had been concentrating on development of completely closed diamond synthesizing system aimed for microgravity experiments. Recently we started the new method with a graphite heater as carbon source. With this method, a completely closed system is successfully performed. In situ gaseous species analysis with gas chromatography and the possible reaction model is discussed.

引用

页码：3069 / 3072

页数：4

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