ELECTROPOLISHING SILICON IN HYDROFLUORIC ACID SOLUTIONS

被引：608

作者：

TURNER, DR

机构：

来源：

关键词：

D O I：

10.1149/1.2428873

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：402 / 408

页数：7

共 17 条

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