RECENT ADVANCES IN a-Si TECHNOLOGY AND ITS APPLICATION TO OPTOELECTRONIC DEVICES

<正>INTRODUCTION In a recent ten years,a remarkable progress has been seen in both physics and technologies of a-Si(hydrogenated amorphous silicon) alloy as a new optoelectronic material.Particularly,its significant properties such as excellent photoconductivity with a considerably high optical absorption coefficient for visible light,and ability to produce a non-epitaxial film growth on any foreign substrates match very timely with a strong potential need for the development of a low cost solar cell as a new energy resources.