FABRICATION TECHNOLOGY AND PROPERTIES OF RARE EARTH GIANT MAGNETOSTRICTIVE FILMS BASED ON MSAW APPLICATION

被引：0

作者：

Si-he CHEN~,Bai-yang ZHOU~,Bin-yi ZHENG~,Deng-yang WU~,Liang-qi LIN~,Mei LIN~ Physical Vapor Deposition Laboratory,College of Materials Science and Engineering,Fuzhou University, Xue Yuan Road,Fuzhou Fujian ,China Logistics Engineering Institute of the Peoples Liberation Army, Changjiang Road,Chongqing ,China ^{[1
]}

机构：

关键词：

RGMFs; magnetostrictive characteristics; MSAW devices;

会议名称：

2010全国压电和声波理论及器件技术研讨会

会议时间：

1600-01-01

会议地点：

中国福建厦门

中图分类号：

O484.1 [薄膜的生长、结构和外延]

学科分类号：

080501 1406

类型：

摘要：

<正>Rare earth giant magnetostrictive thin films(RGMFs) belong to a new type of electro(magnetic) -mechanical conversion functional materials.Such materials have broad application prospects in magnetic surface acoustic wave(MSAW) devices.In this paper,RGMFs samples are fabricated by ion beam sputtering deposition(IBSD).In order to improve the magnetic sensitivity,films after forming are heat-treated at different temperatures in vacuum condition.RGMFs magnetic hysteresis loops and static magnetostriction characteristics are measured by DWS type ultra precision displacement meter and Alternating Gradient Magnetometer respectively.For the purpose of developing better functional thin films aimed at MSAW devices,preparation technology and effect on static-dynamic magnetostriction characteristics of RGMFs samples by vacuum annealing treatment are primary studied.The results indicate that static-dynamic magnetostrictive characteristics of RGMFs are closely related to factors such as preparation technology, sputtering position,and vacuum sensitivity enhancing technology,etc.

引用

页码：552 / 557

页数：6

共 1 条

[1] AN INVESTIGATION OF THE PROPERTIES OF SILICON NITRIDE(SiNx)THIN FILMS PREPARED BY RF SPUTTERING FOR APPLICATION IN SOLAR CELL TECHNOLOGY [C].

Negin Manavizadeh ;

Alireza Khodayari ;

Ebrahim Asl-Soleimani .

2007世界太阳能大会

,2007

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