INTERLAYER DIFFUSION IN INSB-GASB SUPERLATTICE STRUCTURE GROWN BY MULTITARGET RF SPUTTERING

被引：15

作者：

ELTOUKHY, AH

ZILKO, JL

WICKERSHAM, CE

GREENE, JE

机构：

[1] UNIV ILLINOIS,DEPT MET,URBANA,IL 61801

[2] UNIV ILLINOIS,DEPT MECH ENGN,URBANA,IL 61801

[3] UNIV ILLINOIS,COORDINATED SCI LAB,URBANA,IL 61801

来源：

APPLIED PHYSICS LETTERS | 1977年 / 31卷 / 03期

关键词：

D O I：

10.1063/1.89636

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：156 / 158

页数：3

共 9 条

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[4] GROWTH OF IN1-XGAXSB AND IN1-XALXSB FILMS BY MULTI-TARGET RF SPUTTERING [J].

GREENE, JE ;

WICKERSHAM, CE ;

ZILKO, JL .

THIN SOLID FILMS, 1976, 32 (01) :51-54

[5]

GUINIER A, 1963, XRAY DIFFRACTION CRY, P279

[6]

KENDALL DL, 1968, SEMICONDUCTORS SEMIM

[7]

MURKAMI M, 1974, ACTA METALL, V22, P709

[8] MULTITARGET SPUTTERING USING DECOUPLED PLASMAS [J].

WICKERSHAM, CE ;

GREENE, JE .

JOURNAL OF APPLIED PHYSICS, 1976, 47 (11) :4734-4739

[9]

WICKERSHAM CE, UNPUBLISHED

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