FORMATION OF SILICON OXIDE OVER GOLD LAYERS ON SILICON SUBSTRATES

被引：189

作者：

HIRAKI, A

MAYER, JW

LUGUJJO, E

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1972年 / 43卷 / 09期

关键词：

D O I：

10.1063/1.1661782

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3643 / &

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[8] LOW-TEMPERATURE MIGRATION OF SILICON IN THIN LAYERS OF GOLD AND PLATINUM [J].

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