SCHOTTKY AND OHMIC AU CONTACTS ON GAAS - MICROSCOPIC AND ELECTRICAL INVESTIGATION

被引：41

作者：

LILIENTALWEBER, Z

GRONSKY, R

WASHBURN, J

NEWMAN, N

SPICER, WE

WEBER, ER

机构：

[1] STANFORD UNIV,STANFORD ELECTR LABS,STANFORD,CA 94305

[2] UNIV CALIF BERKELEY,DEPT MAT SCI,BERKELEY,CA 94720

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1986年 / 4卷 / 04期

关键词：

D O I：

10.1116/1.583536

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：912 / 918

页数：7

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