CRYSTALLINE DIAMOND GROWTH IN THIN-FILMS DEPOSITED FROM A CH4-AR RF PLASMA

被引:78
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AMARATUNGA, G
PUTNIS, A
CLAY, K
MILNE, W
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10.1063/1.101808
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O59 [应用物理学];
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页码:634 / 635
页数:2
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共 16 条
[1]   ION-BEAM DEPOSITION OF THIN FILMS OF DIAMONDLIKE CARBON [J].
AISENBERG, S ;
CHABOT, R .
JOURNAL OF APPLIED PHYSICS, 1971, 42 (07) :2953-+
[2]   DENSE DIAMONDLIKE HYDROCARBONS AS RANDOM COVALENT NETWORKS [J].
ANGUS, JC ;
JANSEN, F .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1988, 6 (03) :1778-1782
[3]  
CHAIKOVSKII EF, 1981, SOV PHYS-CRYSTALLOGR, V26, P122
[4]   NATURE OF CARBON-CARBON BONDING IN EVAPORATED AND ION-SPUTTERED (DIAMONDLIKE) AMORPHOUS-CARBON FROM (E,2E) SPECTROSCOPY [J].
GAO, C ;
WANG, YY ;
RITTER, AL ;
DENNISON, JR .
PHYSICAL REVIEW LETTERS, 1989, 62 (08) :945-948
[5]   DEPOSITION OF HARD AND INSULATING CARBONACEOUS FILMS ON AN RF TARGET IN A BUTANE PLASMA [J].
HOLLAND, L ;
OJHA, SM .
THIN SOLID FILMS, 1976, 38 (02) :L17-L19
[6]  
JANCA J, 1985, ACTA PHYS SLOVACA, V35, P118
[7]   LARGE AREA CHEMICAL VAPOR-DEPOSITION OF DIAMOND PARTICLES AND FILMS USING MAGNETOMICROWAVE PLASMA [J].
KAWARADA, H ;
MAR, KS ;
HIRAKI, A .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1987, 26 (06) :L1032-L1034
[8]   SUBPLANTATION MODEL FOR FILM GROWTH FROM HYPERTHERMAL SPECIES - APPLICATION TO DIAMOND [J].
LIFSHITZ, Y ;
KASI, SR ;
RABALAIS, JW .
PHYSICAL REVIEW LETTERS, 1989, 62 (11) :1290-1293
[9]   EFFECT OF DILUTION GASES IN METHANE ON THE DEPOSITION OF DIAMOND-LIKE CARBON IN A MICROWAVE-DISCHARGE [J].
MATSUMOTO, O ;
TOSHIMA, H ;
KANZAKI, Y .
THIN SOLID FILMS, 1985, 128 (3-4) :341-351
[10]   ELECTRON-DIFFRACTION EVIDENCE FOR THREEFOLD COORDINATION IN AMORPHOUS HYDROGENATED CARBON-FILMS [J].
MCKENZIE, DR ;
BOTTEN, LC ;
MCPHEDRAN, RC .
PHYSICAL REVIEW LETTERS, 1983, 51 (04) :280-283