MEASUREMENT OF OXYGEN ADSORPTION ON SILICON BYELLIPSOMETRY

被引：106

作者：

ARCHER, RJ

GOBELI, GW

机构：

来源：

关键词：

D O I：

10.1016/0022-3697(65)90163-0

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

引用

页码：343 / &

共 26 条

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[6]

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[7]

DETTORE JF, 1964, ELLIPSOMETRY MEASURE, P245

[8]

DRUDE P, 1889, WIED ANN, V36, P865

[9]

DRUDE P, 1890, WIED ANN, V39, P481

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