EMISSION-SPECTROSCOPY DURING EXCIMER LASER ABLATION OF GRAPHITE

被引：18

作者：

CHEN, XL

MAZUMDER, J

机构：

来源：

APPLIED PHYSICS LETTERS | 1990年 / 57卷 / 21期

关键词：

D O I：

10.1063/1.103927

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Emission spectrum of the laser-induced plasma plume is obtained during KrF excimer laser ablation of graphite in argon and hydrogen gas mixture for deposition of diamond-like films. Bands of C2 and CN molecules dominate the spectrum while weak CI, CII, and Hα lines are also observed. From the emission intensities, molecular vibrational temperature is calculated to be (12-15)×103 K, and concentrations are estimated to be N(C2)=5×1014 cm-3 and N(CN)=2×1014 cm-3.

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页码：2178 / 2180

页数：3

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