STABLE OHMIC CONTACTS TO N-GAAS USING ION-BEAM MIXING

被引：13

作者：

SMITH, SR ^{[1
]}

SOLOMON, JS ^{[1
]}

机构：

[1] UNIV DAYTON,RES INST,DAYTON,OH 45469

来源：

MATERIALS LETTERS | 1985年 / 3卷 / 7-8期

关键词：

We would like to recognizet he support of Mr. Jim Ehret; AFWAL/AADR in performing the implantations of Ge; Mr. Don Thomas for preparingt he Ni evaporations; M r. Paul VonRichter for his contributions to the electricalm easurementsa; nd Mrs. Judith Mescher-Smithf or the SEM work. This work was performed under Air Force Contract No. F336 15-81 -C-5095;

D O I：

10.1016/0167-577X(85)90025-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

18

引用

收藏

页码：294 / 298

页数：5

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