A Tough Silicon Nitride Ceramic with High Thermal Conductivity

被引:304
作者
Zhou, You [1 ]
Hyuga, Hideki [1 ]
Kusano, Dai [2 ]
Yoshizawa, Yu-ichi [1 ]
Hirao, Kiyoshi [1 ]
机构
[1] Natl Inst Adv Ind Sci & Technol, Nagoya, Aichi 4638560, Japan
[2] Japan Fine Ceram Co Ltd, Sendai, Miyagi 9813203, Japan
关键词
MECHANICAL-PROPERTIES; FRACTURE-TOUGHNESS; SI3N4; CERAMICS; MICROSTRUCTURE; BETA-SI3N4; LATTICE; OXYGEN;
D O I
10.1002/adma.201102462
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
A silicon nitride ceramic is prepared by a modified sintering of reaction bonded silicon nitride method (SRBSN). This ceramic has a very high thermal conductivity, high fracture toughness, and a high strength. It is expected to be used as the next-generation insulating substrate material for high-power electronic devices and other new applications.
引用
收藏
页码:4563 / +
页数:6
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