THEORETICAL STUDIES OF SI AND GAAS SURFACES AND INITIAL STEPS IN OXIDATION

被引:112
作者
GODDARD, WA [1 ]
BARTON, JJ [1 ]
REDONDO, A [1 ]
MCGILL, TC [1 ]
机构
[1] CALTECH, HARRY G STEELE LAB ELECT SCI, PASADENA, CA 91125 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1978年 / 15卷 / 04期
关键词
D O I
10.1116/1.569753
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1274 / 1286
页数:13
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