ALTERNATIVE MARKER EXPERIMENT IN FORMATION OF MO AND W SILICIDES

被引：53

作者：

BAGLIN, J

DHEURLE, F

PETERSSON, S

机构：

来源：

APPLIED PHYSICS LETTERS | 1978年 / 33卷 / 04期

关键词：

D O I：

10.1063/1.90341

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：289 / 290

页数：2

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共 13 条

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PRETORIUS R, UNPUBLISHED