COMPARISON OF SURFACE-LAYER ANALYSIS TECHNIQUES

被引：32

作者：

MAYER, JW ^{[1
]}

TUROS, A ^{[1
]}

机构：

[1] CALTECH,PASADENA,CA 91109

来源：

THIN SOLID FILMS | 1973年 / 19卷 / 01期

关键词：

D O I：

10.1016/0040-6090(73)90020-5

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：1 / 10

页数：10

共 29 条

[1] 7ICROANALYSIS BY DIRECT OBSERVATION OF NUCLEAR REACTIONS USING A 2 MEV VAN-DE-GRAAFF [J].

AMSEL, G ;

NADAI, JP ;

DARTEMAR.E ;

DAVID, D ;

GIRARD, E ;

MOULIN, J .

NUCLEAR INSTRUMENTS & METHODS, 1971, 92 (04) :481-&

[2] ANALYSIS OF SURFACE-LAYERS BY LIGHT ION BACKSCATTERING AND SPUTTERING COMBINED WITH AUGER-ELECTRON SPECTROSCOPY (AES) [J].

BEHRISCH, R ;

SCHERZER, BM ;

STAIB, P .

THIN SOLID FILMS, 1973, 19 (01) :57-67

[3]

BIRKS LS, 1963, ELECTRON PROBE MICRO

[4] ASSESSMENT OF ION-INDUCED X-RAYS FOR ANALYSIS [J].

CAIRNS, JA ;

MARWICK, AD ;

MITCHELL, IV .

THIN SOLID FILMS, 1973, 19 (01) :91-102

[5] PRINCIPLES AND APPLICATIONS OF ION-BEAM TECHNIQUES FOR ANALYSIS OF SOLIDS AND THIN-FILMS [J].

CHU, WK ;

MAYER, JW ;

NICOLET, MA ;

BUCK, TM ;

AMSEL, G ;

EISEN, F .

THIN SOLID FILMS, 1973, 17 (01) :1-41

[6] USE OF FOCUSED ION-BEAMS FOR ANALYSIS [J].

COOKSON, JA ;

PILLING, FD .

THIN SOLID FILMS, 1973, 19 (02) :381-385

[7] SECONDARY ION MASS ANALYSIS - TECHNIQUE FOR 3-DIMENSIONAL CHARACTERIZATION [J].

EVANS, CA .

ANALYTICAL CHEMISTRY, 1972, 44 (13) :A67-&

[8] ION PROBE MASS-SPECTROMETRY - OVERVIEW [J].

EVANS, CA .

THIN SOLID FILMS, 1973, 19 (01) :11-19

[9] COMBINED USE OF HE BACKSCATTERING AND HE-INDUCED X-RAYS IN STUDY OF ANODICALLY GROWN OXIDE-FILMS ON GAAS [J].

FELDMAN, LC ;

POATE, JM ;

ERMANIS, F ;

SCHWARTZ, B .

THIN SOLID FILMS, 1973, 19 (01) :81-89

[10] PROTON-INDUCED X-RAY CROSS-SECTIONS FOR SELECTED ELEMENTS FE TO AS AND APPLICATIONS OF X-RAY ANALYSIS TO SEMICONDUCTOR SYSTEMS [J].

GRAY, TJ ;

LEAR, R ;

DEXTER, RJ ;

SCHWETTMANN, FN ;

WIEMER, KC .

THIN SOLID FILMS, 1973, 19 (01) :103-119

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