MOS COMPATIBILITY OF HIGH-CONDUCTIVITY TASI2-N+ POLY-SI GATES

被引:57
作者
SINHA, AK
LINDENBERGER, WS
FRASER, DB
MURARKA, SP
FULS, EN
机构
关键词
D O I
10.1109/T-ED.1980.20051
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
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页码:1425 / 1430
页数:6
相关论文
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