THERMAL-CONDUCTIVITY OF THIN-FILMS - MEASUREMENTS AND UNDERSTANDING

被引：275

作者：

CAHILL, DG

FISCHER, HE

KLITSNER, T

SWARTZ, ET

POHL, RO

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1989年 / 7卷 / 03期

关键词：

D O I：

10.1116/1.576265

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

引用

页码：1259 / 1266

页数：8

共 35 条

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